E.-A. Knabbe, J.W. Coburn, et al.
Surface Science
The addition of a small concentration of suitably chosen noble gas to a reactive plasma is shown to permit the determination of the functional dependence of reactive particle density on plasma parameters. Examples illustrating the simplicity of this method are presented using F atomic emission from plasma-etching discharges and a comparison is made to available data in the literature.
E.-A. Knabbe, J.W. Coburn, et al.
Surface Science
J.W. Coburn
Journal of Applied Physics
F. Fracassi, E. Occhiello, et al.
Journal of Applied Physics
C.D. Tesche, K.H. Brown, et al.
International Conference on Low Temperature Physics (LT) 1983