Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A commercially available photoconductor material, p-diethylaminobenzaldehyde diphenylamine hydrazone, C23H25N3, has been purified and recrystallized from an absolute alcohol solution. The triclinic compound has been characterized by X-ray powder diffraction. Experimental 20 values corrected for systematic errors, relative peak intensities, values of d, and the Miller indices of 74 observed reflections with 20 up to 30.5° are reported. The powder diffraction data have been evaluated, and figures of merit are reported. Unit-cell parameters least-squares refined from the 74 observed reflections of the triclinic compound are in good agreement with those obtained from the single-crystal structure analysis. © 1989, Cambridge University Press. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
T.N. Morgan
Semiconductor Science and Technology
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures