Trigate 6T SRAM scaling to 0.06 μm2
M. Guillorn, J. Chang, et al.
IEDM 2009
The solid-state reaction between a 30-nm-thick Ni film and Ge substrates was investigated using in situ x-ray diffraction, diffuse light scattering, and four-point probe electrical measurements. Our results reveal that Ni 5Ge 3 and NiGe appear consecutively on Ge(111) while they grow simultaneously on amorphous Ge (α-Ge) and Ge(001). Furthermore, phase formation temperatures depend strongly on the nature of the substrate being the lowest on α-Ge and the highest on Ge(111). X-ray pole figure measurements of the NiGe phase obtained from the reaction with an amorphous substrate indicate a completely random texture while several epitaxial and axiotaxial texture components are observed on both Ge(001) and Ge(111). The texturing for the NiGe film on Ge(111), which showed a sequential phase formation, is an order of magnitude more pronounced than for the film on Ge(001) which showed a simultaneous growth. © 2006 American Institute of Physics.
M. Guillorn, J. Chang, et al.
IEDM 2009
C. Lavoie, R. Martel, et al.
MRS Fall Meeting 1996
A.S. Özcan, K.F. Ludwig Jr., et al.
Thin Solid Films
V. Svilan, K.P. Rodbell, et al.
Journal of Electronic Materials