E.E. Marinero, T.H. Baum, et al.
CLEO 1984
Summary form only given. The authors report that the optical probe of second-harmonic generation (SHG) can be used to monitor the change in structure of the silicon (Si) surfaces induced by ion bombardment and the deposition of Si atoms. By relating the surface nonlinear susceptibility to the degree of disordering of the surface, the area of the surface disrupted by each incoming ion or atom was inferred.