Hiroshi Ito, Reinhold Schwalm
JES
A new high resolution profilometer has been demonstrated based upon a non-contacting near field thermal probe. The scanned thermal probe provides a direct measurement of surface profile without dependence upon material properties. Non-contact profiling of resist and metal films have shown a lateral resolution of approximately 100 nanometers and a depth resolution below 10 nanometers. The basic theory of the new probe will be described and the results presented. © 1986.
Hiroshi Ito, Reinhold Schwalm
JES
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
A. Reisman, M. Berkenblit, et al.
JES
T. Schneider, E. Stoll
Physical Review B