PaperCorrosion in low dielectric constant Si-O based thin films: Buffer concentration effectsF.W. Zeng, Stephen M. Gates, et al.AIP Advances
PaperFourth overtone spectra of OH oscillators in simple alcoholsJoseph M. JasinskiChemical Physics Letters
PaperEffect of plasma interactions with low-κ films as a function of porosity, plasma chemistry, and temperatureMarcus A. Worsley, Stacey F. Bent, et al.Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
ReviewProgress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects - State of the artAlfred Grill, Stephen M. Gates, et al.Applied Physics Reviews
