Eberhard Spiller
Proceedings of SPIE 1989
Paper
Smoothing of multilayer x-ray mirrors by ion polishing
Abstract
Ion bombardment at grazing angles of incidence is used to smoothen the boundaries within multilayer x-ray mirrors. Increases in the reflectivity by a factor of 2 for soft x rays have been obtained for RhRu-C mirrors with periods of 60 Å.
Related
Sharon R. Jelinsky, Barry Welsh, et al.
Proceedings of SPIE 1989
Y. Vladimirsky, E. Kallne, et al.
Proceedings of SPIE 1989
Eberhard Spiller
Applied Optics