Eberhard Spiller
Applied Physics Letters
We point out the advantages of the use of x-ray resist as the recording medium in contact x-ray micrography, with subsequent viewing under the scanning electron microscope. Untreated specimens may be replicated with a resolution better than 100 nm. Photographs of latex spheres obtained by this technique are presented.
Eberhard Spiller
Applied Physics Letters
Ivan Haller, Ralph Feder, et al.
JES
Eberhard Spiller, Kurt Grebe, et al.
Proceedings of SPIE 1989
Eberhard Spiller
Applied Optics