Guanxiong Liu, Yanqing Wu, et al.
ACS Nano
Thin carbon films were deposited by ion beam sputtering at temperatures of 77-1073 K. Using Rutherford backscattering spectrometry and electron energy loss spectroscopy, the trends in film density and bonding were examined as a function of deposition conditions. It has been found that film density and sp3 bonding character unexpectedly increased with increased substrate thermal conductivity and decreasing substrate temperature, reaching values of 2.9 g/cc and 50%, respectively.
Guanxiong Liu, Yanqing Wu, et al.
ACS Nano
Soon-Cheon Seo, L.F. Edge, et al.
VLSI Technology 2011
Takashi Ando, Pouya Hashemi, et al.
IEEE Electron Device Letters
Pouya Hashemi, Takashi Ando, et al.
VLSI Circuits 2015