Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
No abstract available.
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008