E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
We report electron-paramagnetic-resonance results for the shallow effective-mass 1s(T2) state of the Si donor associated with the X valleys in indirect-band-gap (x0.4) AlxGa1-xAs layers grown on GaAs. The data confirm definitely that the heteroepitaxial strain splits the three X valleys such that the Xz valley lies above the Xx and Xy valleys. An independent-valley model perfectly accounts for the properties of the donor resonance over the full indirect-band-gap range of the alloy without inclusion of the spin-valley interaction. This effect is attributed to small local, random in-plane strains which quench the first-order spin-valley splitting. © 1990 The American Physical Society.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007