Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A new fluorocarbon-chain-containing molecule, CF3(CF2)7C(O)N(H)CH2CH2SH, for self-assembly was synthesized using a simple and general technique. Self-assembled monolayers of this molecule were studied using ellipsometry, contact angle measurements, grazing-incidence infrared spectroscopy, X-ray photoelectron spectroscopy, and near-edge X-ray absorption fine structure measurements. The films were found to be uniform and reproducible, presenting a fluorocarbon surface (θadv(H2O) = 114°) with predominantly CF3 groups exposed. The C=O and N‒H dipoles are found to be oriented parallel to the gold surface, with the fluorocarbon axis oriented perpendicular to the surface. © 1994, American Chemical Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
Michiel Sprik
Journal of Physics Condensed Matter
J.K. Gimzewski, T.A. Jung, et al.
Surface Science