A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Low-energy electron diffraction (LEED) and Auger electron spectroscopy were used to study the reactions of a clean Si{111} surface with Co. Although above surface coverages of about two monolayers the LEED patterns were always 1×1, measurements of the diffracted intensities revealed that there are three 1×1 phases. With increasing initial Co coverage they are called pre-silicide, CoSi2, and post-silicide phases, respectively. The structures of the pre-silicide and of the CoSi2 phase are very similar to one another. The structure of the CoSi2{111} surface was determined by LEED intensity analysis to be relaxed bulklike, with first interlayer spacing contracted 20% and second interlayer spacing contracted 5%. The structures of the pre- and the post-silicide phases are unknown. © 1986 The American Physical Society.
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
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