Hiroshi Ito, Reinhold Schwalm
JES
The structure of the Si(111)-CaF2 interface has been determined with medium-energy ion scattering and high-resolution transmission electron microscopy. The interface structure is closely related to the bulk crystal structure of CaSi2. The interface is deficient in F, resulting in Si-Ca bonding and a charge-neutral interface. © 1989, American Vacuum Society. All rights reserved.
Hiroshi Ito, Reinhold Schwalm
JES
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Robert W. Keyes
Physical Review B
T.N. Morgan
Semiconductor Science and Technology