S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
No abstract available.
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Sung Ho Kim, Oun-Ho Park, et al.
Small
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007