G.A. Corker, B. Grant, et al.
JES
G.A. Corker, B. Grant, et al.
JES
R.D. Miller, G.M. Wallraff, et al.
Polymer Engineering & Science
Scott A. MacDonald, N.J. Clecak, et al.
Microlithography 1991
Hiroshi Ito, William P. England, et al.
Microlithography 1993