N.J. Clecak, R.J. Cox, et al.
Polymer Engineering & Science
No abstract available.
N.J. Clecak, R.J. Cox, et al.
Polymer Engineering & Science
W.D. Hinsberg, Scott A. MacDonald, et al.
J. Photopolym. Sci. Tech.
S.A. Macdonald, R.D. Allen, et al.
Proceedings of SPIE 1989
W.D. Hinsberg, Scott A. MacDonald, et al.
Microlithography 1992