Conference paper
Polysilanes: solution photochemistry and deep UV lithography
R.D. Miller, G.M. Wallraff, et al.
ACS PMSE 1988
No abstract available.
R.D. Miller, G.M. Wallraff, et al.
ACS PMSE 1988
W.D. Hinsberg, Scott A. MacDonald, et al.
Microlithography 1993
S.A. Macdonald, R.D. Allen, et al.
Proceedings of SPIE 1989
W.D. Hinsberg, Scott A. MacDonald, et al.
Microlithography 1992