W.D. Hinsberg, Scott A. MacDonald, et al.
Microlithography 1993
W.D. Hinsberg, Scott A. MacDonald, et al.
Microlithography 1993
R.D. Miller, D.R. McKean, et al.
ACS National Meeting 1983
S.A. Macdonald, R.D. Allen, et al.
Proceedings of SPIE 1989
Scott A. MacDonald, N.J. Clecak, et al.
Microlithography 1991