Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
Nanopores created by micellar star polymers in amorphous organic silsequioxane thermosets produce morphologically controlled porous materials for semiconductor chip applications (see picture). Pore size is independent of concentration and processing conditions, but depends solely on the size of the polymer molecule.
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Sung Ho Kim, Oun-Ho Park, et al.
Small
Geuntak Lee, Pil Sung Jo, et al.
Macromolecules