Conference paper
Sputtering of Metal Oxide Semiconductor n-p Stacks
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ISOEN 2019
Nanopores created by micellar star polymers in amorphous organic silsequioxane thermosets produce morphologically controlled porous materials for semiconductor chip applications (see picture). Pore size is independent of concentration and processing conditions, but depends solely on the size of the polymer molecule.
Andrea Fasoli, L. Thornquist, et al.
ISOEN 2019
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Advanced Functional Materials
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Soft Matter
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ACS Macro Letters