Ming L. Yu
Physical Review B
A unimolecular templating star-shaped polymer with a compatibilizing outer corona, prepared by tandem ROP/ATRP procedures, was dispersed into a thermosetting organosilicate. The organic polymer was thermalized to leave behind its latent image in the matrix with a pore size that reflected the size of the polymer molecule, and provided the expected reduction in dielectric constant.
Ming L. Yu
Physical Review B
T.N. Morgan
Semiconductor Science and Technology
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
Michiel Sprik
Journal of Physics Condensed Matter