Hiroyuki Hiraoka, Sylvain Lazare, et al.
Microelectronic Engineering
No abstract available.
Hiroyuki Hiraoka, Sylvain Lazare, et al.
Microelectronic Engineering
C.R. Brundle, T.J. Chuang, et al.
Surface Science
T.J. Chuang, H. Seki
SPIE Annual Technical Symposium 1982
T.J. Chuang, K. Domen
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films