Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A technique is described for growing (SN)x crystals which have superior electrical properties to those reported previously. The room temperature electrical conductivity has increased, so has the ratio of the room temperature and 4°K resistivities. There is no conductivity maximum in the region 20-30°K and the superconducting transition temperature is higher. © 1975.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.C. Marinace
JES
Gregory Czap, Kyungju Noh, et al.
APS Global Physics Summit 2025
A. Gangulee, F.M. D'Heurle
Thin Solid Films