Conference paper
Effects of BEOL stack on thermal mechanical stress of Cu lines
Seung-Hyun Rhee, Conal E. Murray, et al.
MRS Spring Meeting 2006
Electrically-insulating samples placed on the grounded sample tray in ionization detectors perturb the electric field within the detector. The resulting alpha particle emissivity of the samples is reduced depending on the magnitude and polarity of the surface voltage. Data are shown for samples with positive and negative surface charge, as well as methods to both measure and eliminate the effects of the surface charge.
Seung-Hyun Rhee, Conal E. Murray, et al.
MRS Spring Meeting 2006
Mihail P. Petkov, Marc H. Weer, et al.
Applied Physics Letters
Praneet Adusumilli, Conal E. Murray, et al.
ECS Meeting 2009
Michael S. Gordon, Kenneth P. Rodbell, et al.
IEEE TNS