J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering