K.N. Tu
Materials Science and Engineering: A
Accurate measurement of inversion thickness is essential in ULSI technology for development and control of ultra-thin gate dielectric processes. However, the accuracy of the measurement can be severely affected by the high gate leakage current and series resistance. This paper presents a methodology to reduce the measurement error by optimizing the ac modulation frequency and test device structures.
K.N. Tu
Materials Science and Engineering: A
P. Alnot, D.J. Auerbach, et al.
Surface Science
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
Frank Stem
C R C Critical Reviews in Solid State Sciences