IN SITU DOPED SILICON VIA LPCVD: INTERACTIONS OF THE DOPANT/SILANE/SILICON SURFACE SYSTEM.
- B.S. Meyerson
- M.L. Yu
- 1983
- ECS Meeting 1983
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138 results for B.S. Meyerson
AMORPHOUS HYDROGENATED SILICON SOLAR CELLS WITH THE HOMOGENEOUS CHEMICAL VAPOR DEPOSITION TECHNIQUE.
- J.F. Nijs
- Jerzy Kanicki
- et al.
- 1983
- E. C. Photovoltaic Solar Energy Conference 1983
IN-SITU DOPED SILICON VIA LPCVD; INTERACTIONS OF THE DOPANT/SILANE/SILICON SURFACE SYSTEM.
- B.S. Meyerson
- M.L. Yu
- 1983
- International Conference on Chemical Vapor Deposition 1983
GAS/SURFACE INTERACTIONS RELEVANT TO CHEMICAL VAPOR DEPOSITION TECHNIQUES.
- B.S. Meyerson
- M.L. Yu
- 1983
- American Institute of Chemical Engineers Annual Meeting 1983
Silicon doping of GaAs and AlxGa1-xAs using disilane in metalorganic chemical vapor deposition
- T.F. Kuech
- E. Veuhoff
- et al.
- 1984
- Journal of Crystal Growth
The Adsorption of PH3 on Si(100) and its Effect on the Coadsorption of SiH4
- Ming L. Yu
- B.S. Meyerson
- 1984
- JVSTA
The preparation of in situ doped hydrogenated amorphous silicon by homogeneous chemical vapor deposition
- B.S. Meyerson
- B.A. Scott
- et al.
- 1983
- Journal of Applied Physics
Homogeneous chemical vapor deposition of amorphous semiconductor thin films
- B.A. Scott
- W.L. Olbricht
- et al.
- 1983
- Journal of Non-Crystalline Solids