Surface grid technique for noncontact e-beam testing of very large scale integrated package substrate
- Kam-Leung Lee
- C.H. Schaefer
- et al.
- 1991
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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On the theoretical determination of the alignment sensitivity of electric and magnetic devices
- C.H. Schaefer
- 1985
- IEEE Transactions on Magnetics