The P300: A system for automatic patterned wafer inspection
- Byron E. Dom
- Virginia H. Brecher
- et al.
- 1988
- Machine Vision and Applications
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13 results for J.S. Batchelder
First-overtone response in modulated photoluminescence emission in silicon at room temperature
- D. Guidotti
- J.S. Batchelder
- et al.
- 1988
- Physical Review B
Nondestructive depth profiling of carrier lifetimes in full silicon wafers
- D. Guidotti
- J.S. Batchelder
- et al.
- 1986
- Applied Physics Letters