Experimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process
- Kafai Lai
- Alan E. Rosenbluth
- et al.
- 2009
- SPIE Advanced Lithography 2009
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80 results for J. Hoffnagle
Wavefront generated by reflection of a plane wave from a conic section
- John A. Hoffnagle
- David L. Shealy
- 2008
- SPIE Optical Engineering + Applications 2008
Wavefront and caustics of a plane wave refracted by an arbitrary surface
- David L. Shealy
- John A. Hoffnagle
- 2008
- Journal of the Optical Society of America A: Optics and Image Science, and Vision
Caustic surfaces in a Keplerian two-lens beam shaper
- John A. Hoffnagle
- David L. Shealy
- 2007
- SPIE Photonic Devices + Applications 2007
Wavefront and caustic surfaces of refractive laser beam shaper
- David L. Shealy
- John A. Hoffnagle
- 2007
- SPIE Optical Engineering + Applications 2007
A solid-state 193 nm laser with high spatial coherence for sub-40 nm interferometric immersion lithography
- Andrew J. Merriam
- Donald S. Bethune
- et al.
- 2007
- SPIE Advanced Lithography 2007
Analytic design of laser beam shaping optics
- David L. Shealy
- John A. Hoffnagle
- 2007
- FiO 2007
Control of Fano line shapes by means of photonic crystal structures in a dye-doped polymer
- Rik Harbers
- Selim Jochim
- et al.
- 2007
- Applied Physics Letters
Efficient nonlinear frequency conversion to 193-nm using cooled BBO
- Andrew J. Merriam
- James J. Jacob
- et al.
- 2007
- ASSP 2007
Optical system for variable resizing of round flat-top distributions
- George Nemeş
- John A. Hoffnagle
- 2006
- SPIE Optics + Photonics 2006