Measurement of the spatial evolution of the deprotection reaction front with nanometer resolution using neutron reflectometry
- Eric K. Lin
- Christopher L. Soles
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
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109 results for Marie Angelopoulos
Chain conformation in ultrathin polymer films
- Ronald L. Jones
- Christopher L. Soles
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
Nanocomposite resist systems for next generation lithography
- L. Merhari
- K.E. Gonsalves
- et al.
- 2002
- Microelectronic Engineering
Thin film confinement effects on the thermal properties of model photoresist polymers
- Christopher L. Soles
- Eric K. Lin
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Confinement effects on the spatial extent of the reaction front in ultrathin chemically amplified photoresists
- Darío L. Goldfarb
- Marie Angelopoulos
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
A high performance E-beam resist coupling excellent dry etch resistance and sub 100nm resolution for advanced mask making
- Wu-Song Huang
- Ranee Kwong
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Image collapse issues in photoresist
- John Simons
- Dario Goldfarb
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
High resolution patterning in chemically amplified resists: The effect of film thickness
- David R. Medeiros
- Wayne M. Moreau
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Characterization of thin and ultrathin polymer and resist films
- Dario L. Goldfarb
- Qinhuang Lin
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Line edge roughness in positive-tone chemically amplified resists: Effect of additives and processing conditions
- Qinghuang Lin
- Dario L. Goldfarb
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering