0.25μm low power CMOS devices and circuits from 8 inch SOI materials
- B. Chen
- A.S. Yapsir
- et al.
- 1995
- ICSICT 1995
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5 results for A.S. Yapsir
Dry surface cleaning in integrated vacuum reactive ion etching processes
- Andrie S. Yapsir
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
CMOS-on-SOI ESD protection networks
- S. Voldman
- R. Schulz
- et al.
- 1998
- Journal of Electrostatics
X-ray photoemission and Raman scattering spectroscopic study of surface modifications of silicon induced by electron cyclotron resonance etching
- A.S. Yapsir
- G.S. Oehrlein
- et al.
- 1990
- Applied Physics Letters
Effects of deuterium plasmas on silicon near-surface properties
- J.L. Lindström
- G.S. Oehrlein
- et al.
- 1989
- Journal of Applied Physics