Microvoids and defect chemistry at the SiSiO2 interface studied by positron annihilation depth profiling
- G.W Rubloff
- B Nielsen
- et al.
- 1990
- Vacuum
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2 results for D.O. Welch
Microvoids at the SiO2/Si interface
- Bent Nielsen
- K.G. Lynn
- et al.
- 1989
- Physical Review B