Strain relaxation in Si1-xGex thin films on Si (100) substrates: Modeling and comparisons with experiments
- Kedarnath Kolluri
- Luis A. Zepeda-Ruiz
- et al.
- 2005
- MRS Spring Meeting 2005
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15 results for Cheruvu S. Murthy
Simultaneous optimization of short-channel effects and junction capacitance in pMOSFET using large-angle-tilt-implantation of nitrogen (LATIN)
- Kilho Lee
- Cheruvu Murthy
- et al.
- 2002
- IEEE Electron Device Letters
Mapping of Electrostatic Potential in Deep Submicron CMOS Devices by Electron Holography
- M. Gribelyuk
- M.R. McCartney
- et al.
- 2002
- Physical Review Letters
Nitrogen implantation and diffusion in silicon
- Lahir Shaik Adam
- Mark E. Law
- et al.
- 1999
- MRS Spring Meeting 1999
On the integration of CMOS with hybrid crystal orientations
- M. Yang
- V. Chan
- et al.
- 2004
- VLSI Technology 2004
On the optimal shape and location of silicided source and drain contacts
- P. Oldiges
- C.S. Murthy
- et al.
- 2002
- SISPAD 2002
Study of arsenic out-diffusion for buried plate formation in trench capacitors
- L. Economikos
- C.S. Murthy
- et al.
- 1998
- IEMT 1998
Kinetics of strain relaxation in Si 1-x Ge x thin films on Si(100) substrates: Modeling and comparison with experiments
- Kedarnath Kolluri
- Luis A. Zepeda-Ruiz
- et al.
- 2006
- Applied Physics Letters
Thermodynamic and kinetic studies of laser thermal processing of heavily boron-doped amorphous silicon using molecular dynamics
- Liguo Wang
- Paulette Clancy
- et al.
- 2002
- Journal of Applied Physics
Nitrogen-induced transient enhanced diffusion of dopants
- Cheruvu Murthy
- Kilho Lee
- et al.
- 2002
- Applied Physics Letters