Electron paramagnetic resonance investigation of charge trapping centers in amorphous silicon nitride films
- W.L. Warren
- Jerzy Kanicki
- et al.
- 1993
- Journal of Applied Physics
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2 results for P.J. McWhorter
Charge trapping centers in N-rich silicon nitride thin films
- W.L. Warren
- Jerzy Kanicki
- et al.
- 1992
- Applied Physics Letters