Analysis of a fence-free platinum etch process
- Keith R. Milkove
- Cindy X. Wang
- 1997
- Integrated Ferroelectrics
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19 results for K.R. Milkove
Insight into the dry etching of fence-free patterned platinum structures
- K.R. Milkove
- C.X. Wang
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A reactive ion etch study for producing patterned platinum structures
- Curtis E. Farrell
- K.R. Milkove
- et al.
- 1997
- Integrated Ferroelectrics
Numerical simulation of etching and deposition processes
- Satoshi Hamaguchi
- Anita A. Mayo
- et al.
- 1997
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Strain relaxation in silicon-germanium microstructures observed by resonant tunneling spectroscopy
- A. Zaslavsky
- K.R. Milkove
- et al.
- 1995
- Applied Physics Letters
Lithography and fabrication processes for sub-100 nm scale complementary metal-oxide semiconductor
- S.J. Wind
- Y. Taur
- et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Fabrication of three-terminal resonant tunneling devices in silicon-based material
- A. Zaslavsky
- K.R. Milkove
- et al.
- 1994
- Applied Physics Letters
Spectroscopy, electron-electron interaction, and level statistics in a disordered quantum dot
- U. Sivan
- F.P. Milliken
- et al.
- 1994
- EPL
High efficiency and low threshold current strained V-groove quantum-wire lasers
- Sandip Tiwari
- G. David Pettit
- et al.
- 1994
- Applied Physics Letters