New spin-on oxycarbosilane low-k dielectric materials with exceptional mechanical properties
- Dubois Geraud
- Teddie Magbitang
- et al.
- 2005
- VMIC 2005
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156 results for Willi Volksen
Oriented nanoporous lamellar organosilicates templated from topologically unsymmetrical dendritic-linear block copolymers
- Teddie Magbitang
- Victor Y. Lee
- et al.
- 2005
- Angewandte Chemie - International Edition
Detection of open or closed porosity in low-κ dielectrics by solvent diffusion
- Marcus A. Worsley
- Mark Roberts
- et al.
- 2005
- Microelectronic Engineering
Effect of plasma interactions with low-κ films as a function of porosity, plasma chemistry, and temperature
- Marcus A. Worsley
- Stacey F. Bent
- et al.
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Phase separation behavior of poly(methyl methacrylate-co-dimethylaminoethyl methacrylate)/methyl silsesquioxane hybrid nanocomposites studied by dansyl fluorescence
- Q.R. Huang
- Curtis W. Frank
- et al.
- 2005
- Chemistry of Materials
Successful dual damascene integration of extreme low k materials (k < 2.0) using a novel gap fill based integration scheme
- S.V. Nitta
- S. Purushothaman
- et al.
- 2004
- IEDM 2004
Supercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectrics
- J.A. Lubguban
- S. Gangopadhyay
- et al.
- 2004
- Journal of Materials Research
Templating organosilicate vitrification using unimolecular self-organizing polymers prepared from tandem ring opening and atom transfer radical polymerizations
- T. Magbitang
- V.Y. Lee
- et al.
- 2004
- Macromolecular Symposia
A buckling-based metrology for measuring the elastic moduli of polymeric thin films
- Christopher M. Stafford
- Christopher Harrison
- et al.
- 2004
- Nature Materials
Toughening of nanoporous glasses using porogen residuals
- Daniel A. Maidenberg
- Willi Volksen
- et al.
- 2004
- Nature Materials