Independent control of adhesive and bulk properties of hybrid silica coatings on polycarbonate
- Krystelle Lionti
- Linying Cui
- et al.
- 2013
- ACS AMI
Publications
Date
Featured collections
Popular topics
156 results for Willi Volksen
Investigation of plasma etch damage to porous oxycarbosilane ultra low-k dielectric
- Robert Bruce
- Sebastian Engelmann
- et al.
- 2013
- Journal of Physics D: Applied Physics
Impact of low-k structure and porosity on etch processes
- Maxime Darnon
- Nicolas Casiez
- et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Post porosity plasma protection: Scaling of efficiency with porosity
- Theo Frot
- Willi Volksen
- et al.
- 2012
- Advanced Functional Materials
Integration of a manufacturing grade, k = 2.0 spin-on material in a single damascene structure
- Willi Volksen
- Sampath Purushothaman
- et al.
- 2012
- ECS J. Solid State Sci. Technol.
A Manufacturing grade, porous oxycarbosilane spin-on dielectric candidate with K 2.0
- Willi Volksen
- Teddie P. Magbitang
- et al.
- 2011
- JES
Low dielectric constant materials
- Willi Volksen
- Robert D. Miller
- et al.
- 2009
- Chemical Reviews
Effect of porogen molecular architecture and loading on structure of porous thin films
- Hae-Jeong Lee
- Christopher L. Soles
- et al.
- 2008
- Chemistry of Materials
Mechanical enhancement of low- k organosilicates by laser spike annealing
- Willi Volksen
- Geraud Dubois
- et al.
- 2008
- JES
Supercritical CO2/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films
- A.A. Lubguban
- J.A. Lubguban
- et al.
- 2008
- Thin Solid Films