Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
The fabrication of multilayered nanoporous poly(methyl silsesquioxane) (PMSSQ) was studied. The morphology and dimensions of the pores were determined by the interaction between the porogen and the inorganic polymers. It was found that the nanoporous PMSSQ films were optically homogeneous because the pores were much smaller than the wavelength of the visible light.
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
A. Gangulee, F.M. D'Heurle
Thin Solid Films