Interhalogen Plasma Chemistries for the Etching of NiMnSb
- H. Cho
- K.B. Jung
- et al.
- 1999
- Electrochemical and Solid-State Letters
Publications
Date
Featured collections
Popular topics
5 results for J.A. Caballero
Comparison of Cl2 and F2 based chemistries for the inductively coupled plasma etching of NiMnSb thin films
- J. Hong
- J.A. Caballero
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
High density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elements
- K.B. Jung
- J. Hong
- et al.
- 1999
- Applied Surface Science
Magnetic and magneto-optical properties of NiMnSb thin films
- J.A. Caballero
- W.J. Geerts
- et al.
- 1998
- Journal of Magnetism and Magnetic Materials
Magneto-optical properties of sputter-deposited NiMnSb thin films
- J.A. Caballero
- W.J. Geerts
- et al.
- 1997
- Applied Physics Letters