Electrical test sites for AMLCD-TFT array process characterization
- E.G. Colgan
- R.J. Polastre
- et al.
- 1998
- MRS Spring Meeting 1998
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3 results for M. Takeichi
Optimization of extrinsic TFT mobility on 550 mm × 650 mm large glass
- M. Takeichi
- S. Takahashi
- et al.
- 1998
- Vacuum
Thin-film-transistor process-characterization test structures
- E.G. Colgan
- R.J. Polastre
- et al.
- 1998
- IBM J. Res. Dev