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Qinghuang Lin- Qinghuang Lin
- Shyng-Tsong Chen
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
- Ronald L. Jones
- Eric K. Lin
- et al.
- 2005
- International Conference on Characterization and Metrology for ULSI Technology 2005
- Qinghuang Lin
- Chuck Black
- et al.
- 2003
- Microlithography 2003
- Qinghuang Lin
- John Simons
- et al.
- 2002
- Microlithography 2002
- Q. Lin
- R. Sooriyakumaran
- et al.
- 2000
- Microlithography 2000
- Q. Lin
- K.E. Petrillo
- et al.
- 1999
- SPIE Advances in Resist Technology and Processing 1999
- Qinghuang Lin
- Ahmad D. Katnani
- et al.
- 1998
- Microlithography 1998
- Katherina Babich
- Alessandro Callegari
- et al.
- 1998
- Microlithography 1998