Publications

34 results for A. Mahorowala

Recent progress in electron-beam resists for advanced mask-making
- - D. Medeiros
  - A. Aviram
  - et al.
- 2001
- IBM J. Res. Dev
Transfer etching of bilayer resists in oxygen-based plasmas
- - A. Mahorowala
  - K. Babich
  - et al.
- 2000
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
193 nm positive tone bilayer resist based on norbornene-maleic anhydride copolymers
- - R. Sooriyakumaran
  - D. Fenzel-Alexander
  - et al.
- 2000
- Microlithography 2000
High resolution 248 nm bilayer resist
- - Q. Lin
  - K.E. Petrillo
  - et al.
- 1999
- SPIE Advances in Resist Technology and Processing 1999