Conference paper
Soft x-ray diffraction of striated muscle
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
A 157 nm resist design that utilizes a hexafluoroisopropanol as an acidic group and an α-trifluoromethylacrylic moiety as a repeat unit is described. The fluoroalcohol group is pendant form either norbornene or styrene. The residual casting solvent concentration is much smaller in the fluoropolymers than in the hydrocarbon counterparts.
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science
J.H. Stathis, R. Bolam, et al.
INFOS 2005
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983