Submicron mapping of strained silicon-on-insulator features induced by shallow-trench-isolation structures
- Conal E. Murray
- M. Sankarapandian
- et al.
- 2007
- Applied Physics Letters
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13 results for Zhonghou Cai
High-resolution strain mapping in heteroepitaxial thin-film features
- C.E. Murray
- H. Yan
- et al.
- 2005
- Journal of Applied Physics
Mapping of strain fields about thin film structures using x-ray microdiffraction
- C.E. Murray
- I.C. Noyan
- et al.
- 2003
- Applied Physics Letters