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Jeffrey Gelorme- 1995
- Microlithography 1995
- Marie Angelopoulos
- J. Gelorme
- et al.
- 1994
- EOS/ESD 1994
- Marie Angelopoulos
- J. Gelorme
- et al.
- 1994
- ANTEC Annual Technical Conference 1994
- Marie Angelopoulos
- J. Gelorme
- et al.
- 1993
- MRS Fall Meeting 1993
- R.D. Allen
- Willard E. Conley
- et al.
- 1992
- Microlithography 1992
- E. Babich
- J. Paraszczak
- et al.
- 1991
- Microelectronic Engineering
- E. Babich
- J. Paraszczak
- et al.
- 1989
- ACS National Meeting 1989
- Willard Conley
- Wayne Moreau
- et al.
- 1990
- Microlithography 1990
- J.M. Hagerhorst-Trewhella
- J. Gelorme
- et al.
- 1989
- Proceedings of SPIE 1989