Publications

49 results for Michael Liehr

High resolution electron energy loss spectroscopic characterization of insulators for Si technology
- - M. Liehr
  - P.A. Thiry
- 1990
- Journal of Electron Spectroscopy and Related Phenomena
Diffuse and abrupt interface formation studied by high resolution electron energy loss spectroscopy
- - P.A. Thiry
  - R. Sporken
  - et al.
- 1990
- Superlattices and Microstructures
Defect formation in SiO₂/Si(100) by metal diffusion and reaction
- - M. Liehr
  - H. Dallaporta
  - et al.
- 1988
- Applied Physics Letters
Stacking-fault-induced defect creation in SiO₂ on Si(100)
- - M. Liehr
  - G.B. Bronner
  - et al.
- 1988
- Applied Physics Letters
Investigation of inas and gasb by high-resolution electron energy-loss spectroscopy
- - P.A. Thiry
  - J.L. Longueville
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kinetics of high-temperature thermal decomposition of Si0 2 on Si(100)
- - M. Liehr
  - J.E. Lewis
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Electrical properties of vacuum annealed Si surfaces
- - J. Werner
  - M. Renier
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Defect microchemistry at the SiO2/Si interface
- - G.W. Rubloff
  - K. Hofmann
  - et al.
- 1987
- Physical Review Letters
High temperature reaction and defect chemistry at the Si/SiO₂ interface
- - K. Hofmann
  - G.W. Rubloff
  - et al.
- 1987
- Applied Surface Science
Dopant redistribution at Si surfaces during vacuum anneal
- - M. Liehr
  - M. Renier
  - et al.
- 1987
- Journal of Applied Physics