Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources
- Ashish Jagtiani
- Hiroyuki Miyazoe
- et al.
- 2016
- JVSTA
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42 results for Deborah Neumayer
Induced e-beam charge impact on spatial orientation of gate-All-Around silicon wires device fabricated on boron nitride substrate
- Shimon Levi
- Konstantin Chirko
- et al.
- 2015
- SPIE Advanced Lithography 2015
CD-SEM metrology evaluation of gate-all-around Si nanowire MOSFET with improved control of nanowire suspension by using a buried boron nitride etch-stop layer
- Guy M. Cohen
- Leathen Shi
- et al.
- 2014
- ASMC 2014
Development, characterization and interface engineering of films for enhanced amorphous silicon solar cell performance
- P. Joshi
- Steven E. Steen
- et al.
- 2010
- PVSC 2010
Development and characterization of advanced process technologies for the fabrication of crystalline-Si solar cells
- Satyavolu S. Papa Rao
- Kate Fisher
- et al.
- 2010
- PVSC 2010
Current transport, gate dielectrics and band gap engineering in graphene devices
- Wenjuan Zhu
- Vasili Perebeinos
- et al.
- 2010
- ICSICT 2010
Silicon nitride gate dielectrics and band gap engineering in graphene layers
- Wenjuan Zhu
- Deborah Neumayer
- et al.
- 2010
- Nano Letters
Sub-20 nm abrupt USJ formation with long ms-flash with sub-2 nm dopant motion control
- Kam-Leung Lee
- Isaac Lauer
- et al.
- 2010
- IWJT 2010
Preparation and structure of porous dielectrics by plasma enhanced chemical vapor deposition
- S. Gates
- D. Neumayer
- et al.
- 2007
- Journal of Applied Physics
Critical aspects of layer transfer and alignment tolerances for 3D integration processes
- D.C. La Tulipe
- L.T. Shi
- et al.
- 2006
- GBC 2006