Plasma processing for advanced microelectronics beyond CMOS
- Nathan Marchack
- L. Buzi
- et al.
- 2021
- Journal of Applied Physics
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15 results for J. M. Papalia
Advancements in Throughput, Lifetime, Purification, and Workflow for Integrated Nanoscale Deterministic Lateral Displacement
- Benjamin Wunsch
- Kuan Yu Hsieh
- et al.
- 2021
- Advanced Materials Technologies
Utilizing photosensitive polymers to evaluate UV radiation exposures in different plasma chamber configurations
- L. Buzi
- Hiroyuki Miyazoe
- et al.
- 2020
- JVSTA
Integrated nanoscale deterministic lateral displacement arrays for separation of extracellular vesicles from clinically-relevant volumes of biological samples
- Joshua T. Smith
- Benjamin Wunsch
- et al.
- 2018
- Lab on a Chip
Cyclic Cl2/H2 quasi-atomic layer etching approach for TiN and TaN patterning using organic masks
- Nathan Marchack
- J. M. Papalia
- et al.
- 2017
- JVSTA