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Simon Dawes- Paul Solomon
- Douglas M. Bishop
- et al.
- 2021
- IRPS 2021
- Pouya Hashemi
- Takashi Ando
- et al.
- 2017
- VLSI Technology 2017
- Pouya Hashemi
- Takashi Ando
- et al.
- 2016
- VLSI Technology 2016
- 2016
- SPIE Advanced Lithography 2016
- 2015
- SPIE Advanced Lithography 2015
- Leonidas E. Ocola
- James Bucchignano
- et al.
- 2022
- Journal of Vacuum Science and Technology B
- Benjamin Wunsch
- Sung-Cheol Kim
- et al.
- 2019
- Lab on a Chip
- Wenjuan Zhu
- Damon B. Farmer
- et al.
- 2013
- Applied Physics Letters