Publications

150 results for Matthew Copel

Interfacial oxide formation and oxygen diffusion in rare earth oxide-silicon epitaxial heterostructures
- - V. Narayanan
  - S. Guha
  - et al.
- 2002
- Applied Physics Letters
Characterization of silicate/Si(001) interfaces
- - M. Copel
  - E. Cartier
  - et al.
- 2002
- Applied Physics Letters
High temperature stability of Al₂O₃ dielectrics on Si: Interfacial metal diffusion and mobility degradation
- - S. Guha
  - E. Gusev
  - et al.
- 2002
- Applied Physics Letters
Interface reactions in ZrO ₂ based gate dielectric stacks
- - M. Gribelyuk
  - A.C. Callegari
  - et al.
- 2002
- Journal of Applied Physics
Ultrathin high-K metal oxides on silicon: Processing, characterization and integration issues
- - E. Gusev
  - E. Cartier
  - et al.
- 2001
- Microelectronic Engineering
A-site surface termination in strontium titanate single crystals
- - A.G. Schrott
  - J. Misewich
  - et al.
- 2001
- Applied Physics Letters
Molecular-beam-deposited yttrium-oxide dielectrics in aluminum-gated metal-oxide-semiconductor field-effect transistors: Effective electron mobility
- - L.Å. Ragnarsson
  - S. Guha
  - et al.
- 2001
- Applied Physics Letters
Robustness of ultrathin aluminum oxide dielectrics on Si(001)
- - M. Copel
  - E. Cartier
  - et al.
- 2001
- Applied Physics Letters
Formation of a stratified lanthanum silicate dielectric by reaction with Si(001)
- - M. Copel
  - E. Cartier
  - et al.
- 2001
- Applied Physics Letters
Thermally stable ultra-thin Zr silicate for CMOS applications
- - Z. Luo
  - T.P. Ma
  - et al.
- 2001
- International Symposium on VLSI Technology, Systems, and Applications, Proceedings