A digital CMOS micro-hotplate array for analysis of environmentally relevant gasesU. FreyM. Grafet al.2004ESSCIRC 2004
Metal oxide-based monolithic complementary metal oxide semiconductor gas sensor microsystemMarkus GrafDiego Barrettinoet al.2004Analytical Chemistry
Very high Q-factor in water achieved by monolithic, resonant cantilever sensor with fully integrated feedbackY. LiC. Vancuraet al.2003SENSORS 2003
Thousands of Microcantilevers for Highly Parallel and Ultra-dense Data StorageP. VettigerT.R. Albrechtet al.2003IEDM 2003