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Eduard Cartier- R. Ludeke
- P. Lysaght
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- A. Kerber
- E. Cartier
- et al.
- 2003
- INFOS 2003
- A. Kerber
- E. Cartier
- et al.
- 2003
- VLSI Technology 2003
- A. Kerber
- E. Cartier
- et al.
- 2003
- IRPS 2003
- A. Kerber
- E. Cartier
- et al.
- 2003
- IRPS 2003
- 2001
- Microelectronic Engineering
- 2001
- Microelectronic Engineering
- M. Poppeller
- E. Cartier
- et al.
- 1999
- Microlithography 1999